Search results for "Resist coating"

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Resist Coating of Cylindrical Samples for 3‐D Lithography

1995

A quantitative investigation of a dipping technique for depositing a thin layer of resist on circularly symmetrical objects is presented. The results obtained are valuable for preparing three-dimensional (3-D) surfaces suited for spatial microlithographic processes in the 1 to 10 μm linewidth range. © 1995, MCB UP Limited

Resist coating 3-D Lithography Laser writingMaterials sciencebusiness.industryThin layerengineering.materialCondensed Matter PhysicsSettore ING-INF/01 - ElettronicaAtomic and Molecular Physics and OpticsSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsLaser linewidthOpticsCoatingResistengineeringElectrical and Electronic EngineeringbusinessLithographyMicroelectronics International

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